The lithography machine dual-stage motion control system involves highly complex control tasks, demanding extremely high speed and precision. Furthermore, the equipment is bulky, with significant spatial distances between various sensors and actuators, numerous cables, and severe on-site electromagnetic interference.

To meet the control system requirements, this paper leverages the high-speed floating-point computing capability of DSP, the powerful parallel processing capability of FPGA, and the long transmission distance and strong anti-interference characteristics of fiber optic communication, proposing a data acquisition and servo interface system solution based on FPGA+DSP+high-speed fiber optic transmission. The entire system is divided into two parts: the core computing and control unit and the remote sensing and servo control unit.

Based on the overall system design, the system hardware circuits were designed, including FPGA system circuits, DSP system circuits, fiber optic serial communication circuits, EnDat circuits, analog-to-digital/digital-to-analog conversion circuits, and isolated digital IO circuits, and a system power supply solution was also designed. Using a Top-Down design methodology, the FPGA software drivers were divided into sub-modules such as the fiber optic communication kernel, D/A converter controller, A/D converter controller, EnDat protocol kernel, and incremental position value acquisition controller, and then detailed logic driver development was carried out for each sub-module.

2 Overall Scheme for High-Speed Data Acquisition and Servo Interface